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eletrônicos

 
BIBLIOTECA LQES DE MEMS

("Microelectromechanical Systems": Sistemas Microeletromecânicos)


O termo MEMS (Microelectromechanical systems) foi primeiramente utilizado nos Estados Unidos, para designar máquinas contendo partes móveis - tão pequenas quanto um fio de cabelo -, possuindo não só componentes elétricos, mas também mecânicos, montados sobre um substrato de silício. Refere-se, ainda, a Microsistemas, Microestruturas, Tecnologia de Microestruturas (MST - Microstructure Technology) e Mecatrônica.

Desde seu início, os avanços desta área têm propiciado intrigantes possibilidades, revolucionando não só a produção, como também o uso de sensores e detetores. Os MEMS têm permitido novas soluções, as quais vêm acelerando os desenvolvimentos nos campos de telecomunicações, biotecnologia, monitoramento ambiental, tecnologia da informação, entre outros.

Hoje em dia, este conceito generalizou-se e expandiu-se chegando até os canais microfluídicos: canais tão estreitos quanto um fio de cabelo (cerca de 100 mícrons !) que, tirando partido das propriedades dos fluidos, permite separá-los. Tais canais constituem-se no componente fundamental daquilo que tem sido denominado "laboratório-num-chip", do inglês "lab-on-a-chip".

O lab-num-chip, na verdade, trata-se de um pequeno chip (freqüentemente do tamanho de um cartão de crédito), contendo canais microfluídicos, nos quais líquidos e gases podem ser separados e conduzidos para microsensores que realizam a análise dos seus elementos constituintes.

Não temos dúvida - e é bem por isto que resolvemos disponibilizar esta Biblioteca -, de que este tema acabará por se constituir numa das grandes fronteiras do desenvolvimento de sistemas a serviço da análise química, em todas as suas acepções, sobretudo quando pudermos acrescentar a tais sistemas a "inteligência", por exemplo, via domínio e aplicação do reconhecimento molecular.

Oswaldo Luiz Alves, Novembro de 2005.
Versão 2.0




Bibliografia

1991 a 1994 1995 1996 1997 1998 1999 2000 2001 2002
2003 2004 2005 2006


1991 a 1994  - voltar

D. Cho (Editor), "Micromechanical Sensors Actuators and Systems", Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, Georgia, December 1-6, 1991, Vol. 32, American Society of Mechanical Engineers Dynamic Systems and Control, USA, 1991, pages (?).

W. Benecke and H.C. Petzold (Editors), "IEEE Micro Electro Mechanical Systems: Proceedings: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots", Travemunde, Germany, IEEE, 1992, 240 pages.

K.W. Brendley and R. Steeb (Editors), "Military Applications of Microelectromechanical Systems", Rand Corporation, New York, 1993, pages (?).

1995  - voltar

D. Darling, "Beyond 2000: Micromachines and Nanotechnology: The Amazing New World of the Ultrasmall", Beyond 2000, Dillon Press, 1995, pages (?).

L.E. Parker (Editor), "Microrobotics and Micromechanical Systems", 25 October 1995, Philadelphia, Pennsylvania, Proceedings of Spie-The International Society for ptical Engineering, Vol. 2593, Society of Photo-Optical Instrumentation Engineers, Microrobotics and Micromechanical Systems Conference, Society of Photo-optical Instrumentation Engineers, ISBN: 0819419575; 1995, 132 pages.

W.E. Bailey, M. E. Motamedi and F.C. Luo (Editors), "Microelectronic Structures and Microelectromechanical Devices", 24 October, 1995, Austin, Texas Proceedings of Spie-The International Society for Optical Engineering, Vol. 2641, Semiconductor Equipment and Materials International, National Institute of Standards and Technology U.S., Society of Photo-Optical Instrumentation Engineers, 1995, pages (?).

R. Roop and K. Chau (Editors), "Micromachined Devices and Components", 23-24 October, 1995, Austin, Texas, Proceedings of Spie-The International Society for Optical Engineering, Vol. 2642, Semiconductor Equipment and Materials International, Society of Photo-Optical Instrumentation Engineers, National Institute of Standards and Technology U.S., Society of Photo-Optical Instrumentation, 1995, 296 pages.

C.E. Hunt, H. Baumgart, S.S. Iyer, T. Abe, and U. Gosele (Editors), "Proceedings of the Third International Symposium on Semiconductor Wafer Bonding: Physics and Applications", Electrochemical Society, 1995, 610 pages.

1996  - voltar

MHS' 96, "Proceedings of the Seventh International Symposium on Micro Machine and Human Science", Nagoya Municipal Industrial Research Institute, October 2-4, 1996, Institute of Electrical and Electronics Engineers, IEEE Service Center, 1996, 276 pages.

A. Schroth, "Modelle für Balken und Platten in der Mikromechanik Mass Market", Dresden University Press, 1996, 136 pages.

H. Romankiw, "Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices", Electrochemical Society, 1996, 802 pages.

1997  - voltar

John Wiley & Sons Inc, "Lab-on-a-Chip: The Revolution in Portable
Instrumentation"
, John Wiley & Sons, 2nd Edition, 1997, 152 pages.

IEEE, "Microelectromechanical Systems", 11th International Workshop, IEEE, 1998, 750 pages.

C.T. Avedisian (Editor), "Microelectromechanical Systems (Mems): Microscale Thermal Phenomena in Electronic Systems, Applications of Microfabrication to Fluid Mechanics", Mechanics in Micro-Electro-Mechanical, Vol. 59, International Mechanical Engineering Congress and Exposition / American Society of Mechanical Engineers Dynamic Systems and Control, Amer Society of Mechanical Engineers, 1997, 460 pages.

National Academy Press, "Microelectromechanical Systems: Advanced Materials and Fabrication Methods", National Academy Press, 1997, 61 pages.

W.S. Trimmer (Editor), "Micromechanics and MEMS: Classic and Seminal Papers to 1990", IEEE, 1997, 704 pages.

W.S. Chang (Editor), "Microelectromechanical Systems (Mems): Micromechanical Systems, Microscale Energy Transport", International Mechanical Engineering Congress and Exposition, Series, Vol. 62, Amer Society of Mechanical Engineers, 1997, 284 pages.

MHS' 97, "Proceedings of 1997 International Symposium on Micromechatronics and Human Science", Nagoya Municipal Industrial Research Institute, International Symposium on Micromechatronics and Human Science, 1997, 250 pages.

1998  - voltar

A.W. Chow, "Electroosmosis Flow in Microchannels and Applications to Lab-
on-a-Chip"
, American Institute of Chemical Engineers, 1998, (?) pages.

IEEE, "Microelectromechanical Systems", 11th International Workshop, IEEE, 1998, 750 pages.

X. Zhang, N.R. Aluru, L. Lin and F.K. Forster (Editors), "Micro-Electro-
Mechanical Systems (MEMS) 1998"
, Micro-Manuacturing Processes in MEMS and Other Advanced Systems, Vol. 66, International Mechanical Engineering Congress and Exposition / American Society of Mechanical Engineers Dynamic Systems and Control American Society of Mechanical Engineers, 1998, 593 pages.

G.T.A. Kovacs, "Micromachined Transducers Sourcebook", McGraw-Hill, New York, 1998, 944 pages.

T. Fukuda and W. Menz (Editors), "Micro Mechanical Systems", Elsevier Health Sciences, 1998, 276 pages.

V.M. Bright and B.J. Thompson (Editors), "Selected Papers on Optical MEMS", Spie Milestone Series, Vol. 153, Society of Photo-optical Instrumentation Engineers, USA, 1998, pages (?).

A. Sulzmann, and B.J. Nelson (Editors), "Microrobotics and Micromanipulation", November 1998, Boston, Massachusetts, Proceedings of SPIE, Vol. 3519, Society of Photo-optical Instrumentation Engineers, USA, 1998, 224 pages.

B.F. Romanowicz, "Methodology for the Modeling and Simulation of
Microsystems"
, Kluwer Academic Publishers, Dordrecht, 1998, 136 pages.

A. Van Den Berg, P. Bergveld (Editors), "Sensor Technology in the Netherlands: State of the Art", National Sensor Conference 1998 University of Twente, Kluwer Academic Publishers, 1998, 340 pages.

(Unknown), "Microelectromechanical Devices (MEMS): Powerhouse for Growth in Sensors, Actuators and Control Systems", Technical Insights John Wiley & Sons, New York, 1998, 175 pages.

(Unknown), "Procc. of The Eleventh Annual International Workshop on Micro Electro Mechanical Systems: an investigation of micro structures, sensors, actuators, machines and robots", January, 1998, Heidelberg, Germany, Institute of Electrical and Electronics Engineers, 1998, 666 pages.

1999  - voltar

H.J. De Los Santos, "(MEM) Microwave Systems", Artech House, USA, 1999, 233 pages.

F. Payne, and A.M. Parameswaran (Editors), "Education in Microelectronics and MEMS", October 1999, Queensland, Australia, Proceedings of Spie, Vol. 3894, Society of Photo-Optical Instrumentation Engineers, Australia Institution of Radio and Electronics Engineers, Queensland Government State Development, Griffith University Microelectronics, Society of Photo-optical Instrumentation Engineers, October 1999, pages (?).

B.J. Nelson and J.M. Breguet (Editors), "Microrobotics and Microassembly", September, 1999, Boston, Massachusetts, Proceedings of Spie-The International Society for Optical Engineering, Vol. 3834, Society of Photo-optical Instrumentation Engineers, USA, 1999, pages (?).

B. Bourtois, S.B. Crary, W. Ehrfeld, H. Fujita, J.M. Karam, K.W. Markus and B. Courtois (Editors), "Design, Test, and Microfabrication of MEMS and MOEMS", March - April 1999, Paris, France , Proceedings of Spie-The International Society for Optical Engineering, Vol. 3680, Society of Photo-optical Instrumentation Engineers, 1999, 1192 pages.

N.W. Bergmann, O. Reinhold, and N.C. Tien (Editors), "Electronics and Structures for MEMS", October 1999, Queensland, Australia, Proceedings of Spie-The International Society for Optical Engineering, Vol. 3891, Society of Photo-optical Instrumentation Engineers, 1999.

M. Gross, "Travels to the Nanoworld: Miniature Machinery in Nature and Technology", Perseus Publishing, New York, 1999, 250 pages.

R.A. Lawton, W.M. Miller, G. Lin and R. Ramesham (Editors), "MEMS Reliability for Critical and Space Applications", September 1999, Santa Clara, California, Proceedings of Spie, Vol. 3880, Photo-Optical Instrumentation Engineers, Solid State Technology, 1999, pages (?).

M.R. Hornung and O. Brand (Editors), "Micromachined Ultrasound-Based Proximity Sensors", (Microsystems 4), Kluwer Academic Publishers, 1999, 136 pages.

B. Courtois, S. Demidenko (Editors), "Design, Characterization, and Packaging for MEMS and Microelectronics", October 1999, Australia , Proceedings of Spie-The International Society for Optical Engineering, Vol. 3893, Society of Photo-optical Instrumentation Engineers, 1999, pages (?).

S.E. Lyshevski, "Electromechanical Systems, Electric Machines, and Applied Mechatronics", CRC Press, 1999, 800 pages.

H.J. De Los Santos, "Introduction to Microelectromechanical (MEM) Microwave Systems", Artech House, 1999, 233 pages.

S.H. Lee, J.A. Cox (Editors), "Micromachine Technology for Diffraction and Holographic Optics", September 1999, Santa Clara, California, Proceedings of Spie, Vol. 3879, Society of Photo-Optical Instrumentation Engineers, Solid State Technology Organization, Society of Photo-optical Instrumentation Engineers, 1999, pages (?).

2000  - voltar

M. Koch, A. Evans and A. Brunnschweiler, "Microfluidic Technology and Applications" (Microtechnologies and Microsystems Series), Taylor & Francis Group, 2000, 350 pages.

Savage, "Lab-on-a-Chip", John Wiley & Sons Inc., 2000 (?), 114 pages.

C.H. Mastrangelo and H. Becker (Editors), "Microfluidic Devices and Systems III", 18-19 September 2000 Santa Clara, USA (Proceedings of Spie, Vol 4177), Society of Photo-Optical Instrumentation Engineers (Corporate Author), Sandia National Laboratories (Corporate Author), 2000, 292.

C.H. Ahn and A.B. Frazier (Editors), "Microfluidic Devices and Systems II", 20-21 September, 1999, Santa Clara, California (Proceedings of Spie, Volume 3877) Society of Photo-Optical Instrumentation Engineers (Corporate Author), 1999, (?) pages.

N. Maluf, "An Introduction to Microelectromechanical Systems Engineering", Artech House MEMS Library, Artech House, USA, 2000, 225 pages.

S.E. Lyshevski, "Nano - and Micro-Electromechanical Systems:
Fundamentals of Nano-and Microengineering"
, CRC Press, Boca Raton, 2000, 352 pages.

T. Fukuda and W. Menz (Editors), "Micro Mechanical Systems: Principles and Technology", Handbook of Sensors and Actuators, Vol. 6, Materials Science of Microelectromechanical Systems (MEMS) Devices, December 1998, Boston, Massachusetts, Materials Research Society Symposia Proceedings, 546; Arthur H. Heuer and S.J. Jacobs (Editors), Materials Research Society, 2000, 246 pages.

S.B. Brown et al. (Editor), "Microelectromechanical Structures for Materials Research", April, 1998, San Francisco, California, Materials Research Symposia Proceedings 518, Material Research Society, 2000, 248 pages.

P.R. Choudhury (Editor), "MEMS and MOEMS Technology and Applications", SPIE PRESS Monograph Vol. PM85, Society of Photo-optical Instrumentation Engineers, 2000, 528 pages.

R.P. Mariella (Editor), "Micro- And Nanotechnology for Biomedical and Environmental Applications", January 2000, San Jose, California, USA, Proceedings of Spie, Vol. 3912, Progress in Biomedical Optics, Vol. 1, Number 6), Society of Photo-Optical Instrumentation Engineers, United States Air Force Office, International Biomedical Optics Society of Photo-optical Instrumentation Engineers, 2000, 194 pages.

M.H. Bao, "Micro Mechanical Transducers", Elsevier Health Sciences, Amsterdan, 2000, 390 pages.

C.S. Lynch (Editor), "Smart Structures and Materials 2000: Active Materials: Behavior and Mechanics", Proceedings of Spie-The International Society for Optical Engineering, Vol. 3992, Society of Photo-optical Instrumentation Engineers, 2000, pages (?).

A.P. Lee, Q. Tan, and R.S. Keynton (Editors), "Microelectromechanical Systems", American Society of Mechanical Engineers, 2000, 744 pages.

B. Courtois, J.M. Karam and K.J. Gabriel (Editor), "Design, Test, Integration, and Packaging of MEMS/MOEMS", May 2000, Paris, France , Proceedings of Spie-The International Society for Optical Engineering, Vol. 4019, Society of Photo-optical Instrumentation Engineers, 2000, 612 pages.

2001  - voltar

M.J. Heller and A. Guttman (Editors), "Integrated Microfabricated Biodevices", Marcel Dekker, 1st edition, 2001, 456 pages.

J.W. Gardner and V.K. Varadan, "Microsensors, MEMS and Smart Devices", John Wiley & Sons, 2001, 528 pages.

S.D. Senturia, "Microsystem Design", Publisher: Kluwer Academic Publishers, 2001, 720 pages.

T.R. Hsu, "MEMS and Microsystems: Design and Manufacture", McGraw-Hill, New York, 2001, 448 pages.

H. Kahn, M. Judy, S.M. Spearing and M.P. Deboer (Editors), "Materials Science of Microelectromechanical, Systems (MEMS) Devices III Symposium", November 2000, Boston, Massachusetts, U.S.A, Symposium Proceedings Series, Vol. 657, Materials Research Society, July 2001, pages (?).

V.K. Varadan, X. Jiang and V.V. Varadan (Authors), "Microstereolithography and other Fabrication Techniques for 3D MEMS", John Wiley & Sons, 2001, 274 pages.

R.J. Wiegerink and M. Elwenspoek, "Mechanical Microsensors
(Microtechnology and MEMS)"
, Publisher: Springer Verlag, 2001, 320 pages.

IEEE Circuits and Systems Society (Editor), "2001 Microelectromechanical Systems Conference", August 2001, Berkeley, California, USA, IEEE, USA, 2001, pages (?).

2002  - voltar

M. Koch, A. Evans and A. Brunnschweiler, "Microfluidic Technology and Applications" (Microtechnologies and Microsystems Series), Springer, 2002, 300 pages.

V.K. Varadan, K.J. Vinoy, K.A. Jose, V.K. Varadan and U. Zoelzer (Editors), "RF Mems & Their Applications", John Wiley & Sons, 2002, 350 pages.

T. Osaka, M. Datta and J.W. Schultze (Editors), "Electrochemical Microsystem Technologies" (New Trends in Electrochemical Technology), CRC Press, 2002, 576 pages.

M.P. Hughes, "Nanoelectromechanics in Engineering and Biology", CRC Press, 2002, 344 pages.

F.E.H. Tay, "Microfluidics and BioMEMS Applications" (Microsystems),
Springer, 1 edition, 2002, 300 pages.

J. Saleh, "Fluid Flow Handbook", McGraw-Hill Professional, 1 edition. 2002, 1000 pages.

D. Lange, H. Baltes and O. Brand, "Cantilever-Based CMOS Nano-Electro-
Mechanical Systems"
, Springer Verlag, New York, 2002, 158 pages.

M.J. Madou, "Fundamentals of Microfabrication: The Science of
Miniaturization"
, CRC Press, Boca Raton, 2002, 752 pages.

N.T. Nguyen and S. Wereley, "Fundamentals and Applications of
Microfluidics"
, Artech House Microelectromechanical Systems Library, Artech House, 2002, 487 pages.

H.J. De Los Santos, "RF MEMS Circuit Design for Wireless Communications", Artech House, USA, 2002, 224 pages.

J.A. Pelesko and D.H. Bernstein, "Modeling MEMS and NEMS", CRC Press, Boca Raton, 2002, 376 pages.

S.M. Hsu and Z. C. Ying (Editors), "Nanotribology: Critical Assessment and Research Needs", Kluwer Academic Publishers, Dordrecht, 2002, 456 pages.

G.M. Rebeiz, "RF MEMS: Theory, Design, and Technology", John Wiley & Sons, New York, 2002, 350 pages.

F.E.H. Tay (Editor), "Materials & Process Integration for MEMS (Microsystems)", Series, Vol. 9, Kluwer Academic Publishers, Dordrecht, 2002, 300 pages.

K.E. Bower et al. (Editor), "Polymers, Phosphors, and Voltaics for Radioisotope Microbatteries", CRC Press. Boca Raton, 2002, 504 pages.

R.P. Manginell (Editor), "Biomems and Bionanotechnology", Materials Research Society Symposia Proceedings, Vol. 729, Material Research Society, 2002, pages(?).

T. Zhang, K. Chakrabarty, R.B. Fair and S.E. Lyshevsky, "Microelectrofluidic Systems: Modeling and Simulation", CRC Press, Boca Raton, 2002, 288 pages.

S.E. Lyshevski, "MEMS and NEMS: Systems, Devices, and Structures", CRC Press, Boca Raton, 2002, 480 pages.

A.A. Ayon (Editor), "Materials Science of Microelectromechanical Systems (MEMS) Devices IV", Materials Research Society Symposia Proceedings, Vol. 687, Material Research Society, 2002, pages (?).

2003  - voltar

J.W. Gardner and V.K. Varadan, "Microsensors, MEMS and Smart Devices", John Wiley & Sons, 2001, 528 pages.

E. Oosterbroeka and A. van den Berg, "Lab-on-a-Chip: Miniaturized Systems for (Bio)Chemical Analysis and Synthesis", Elsevier Science, 2003, 450 pages.

T-Ran Hsu, "Mems Packaging" (Emis Processing), Institution of Electrical Engineers, 2003, 272 pages.

A.S. Rathore and A. Guttman (Editors), "Electrokinetic Phenomena", Marcel Dekker, 2003, 496 pages.

W-Kai Chen (Editor), "VLSI Technology", CRC Press, 2003, 400 pages.

2004  - voltar

J.W. Gardner and V.K. Varadan, "Microsensors, MEMS and Smart Devices", John Wiley & Sons, 2001, 528 pages.

Business Communications Co., "Microfluidics Technologies", Digital, Business Communications Co., 2004, 208 pages.

D. Li, "Electrokinetics in Microfluidics" (Interface Science and Technology), Academic Press, 2004, 652 pages.

J.J. Ducrée and R. Zengerle, "Microfluidics" (Microtechnology and MEMS), Springer, 2004, 400 pages.

O. Geschke (Editor), "Microsystem Engineering of Lab-on-a-chip Devices" (Biotechnology: a Multi-Volume Comprehensive Treatise), John Wiley & Sons; 2nd Rev edition, 2004, 270 pages.

Society of Photo Optical, "Lab-on-a-chip: Platforms, Devices, and
Applications"
(Proceedings of SPIE), Society of Photo Optical, 2004, (?) pages.

H. Andersson and A. van den Berg, "Lab-on-Chips for Cellomics: Micro and Nanotechnologies for Life Science", Springer, 2004, 363 pages.

R.S. Greco, F.B. Prinz and R.L. Smith (Editors), "Nanoscale Technology In Biological Systems", CRC Press, 2004, 485 pages.

H.J. de Los Santos, "Introduction to Microelectromechanical Microwave Systems", Second Edition, Artech House Publishers, 2004, 277 pages.

S. Franssila, "Introduction to Microfabrication", John Wiley & Sons, 2004, 422 pages,

S.P. Beeby, G. Ensel and M. Kraf, "MEMS Mechanical Sensors", Artech House Publishers, 2004, 282 pages.

V. Hessel, S. Hardt and H. Löwe, "Chemical Micro Process Engineering: Fundamentals, Modelling and Reactions", John Wiley & Sons, 2004, 712 pages.

C.J.M van Rijn, "Nano and Micro Engineered Membrane Technology"
(Membrane Science and Technology), Elsevier Science, 2004, 396 pages.

2005  - voltar

P. Tabeling, P. Tabeling and S. Cheng, "Introduction to Microfluidics", Oxford University Press, 2005, 288 pages.

P.H. Li and P.C.H. Li, "Microfluidic Lab-on-a-chip for Chemical And Biological Analysis And Discovery" (Chromatographic Science), CRC Press, 2005, 512 pages.

J. Moorthy, "Integrated microfluidic platform for diagnostics and protein interaction studies in hydrogel based cell mimics" (Dissertation), ProQuest Information and Learning; ISBN: B000BIN1GQ, 2005, 161 pages.

S. Li, "Development of microfluidic systems for biological applications and their transport issues", ProQuest Information and Learning; ISBN: B000BIM4SC, 2005,173 pages.

J. Berthier and P. Silberzan, "Microfluidics for Biotechnology", Artech House Publishers, 2005, 374 pages.

J.O. Wilkes, "Fluid Mechanics for Chemical Engineers with Microfluidics and CFD" (Prentice-Hall International Series in the Physical and Chemical Engineering Sciences), Prentice Hall PTR, 2005, 784 pages.

A. Jerraya and Wayne Wolf, "Multiprocessor Systems-on-Chips" (The Morgan Kaufmann Series in Systems on Silicon), Morgan Kaufmann, 2004, 608 pages.

K.S. Breuer (Editor), "Microscale Diagnostic Techniques", Springer, 2005, 260 pages.

2006  - voltar

H. Becker, "Technologies for the Microfabrication of Microfluidic Devices: The polymer foundry concept", Unknown Binding (American Institute of Chemical Engineers), 2000, (?) pages.

E.F. Hasselbrink, "Microfluidic Systems: Fundamentals of Flow, Transport, and Reaction", Springer, 2006, 450 pages.

S. Hardt and F. Schonfeld (Editors), "Microfluidic Technologies for Miniaturized Analysis Systems", Springer, 2006, 550 pages.

N-Trung Nguyen and S.T. Wereley, "Fundamentals And Applications of
Microfluidics"
, Artech House Publishers, 2006, 972 pages.

S.D. Minteer (Editor), "Microfluidic Techniques: Reviews And Protocols" (Methods in Molecular Biology), Humana Press, 2006, (?) pages.

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